Micro Electromechanical Systems

Micro-Electro-Mechanical Systems, or MEMS, is a technology that in its most general form can be defined as miniaturized mechanical and electro-mechanical elements (i.e., devices and structures) that are made using the techniques of micro fabrication. The critical physical dimensions of MEMS devices can vary from well below one micron on the lower end of the dimensional spectrum, all the way to several millimeters. The MEMS pressure sensors in respiratory monitoring are used in ventilators to monitor the patient's breathing. 

The one main criterion of MEMS is that there are at least some elements having some sort of mechanical functionality whether or not these elements can move. The term used to define MEMS varies in different parts of the world. In the United States they are predominantly called MEMS, while in some other parts of the world they are called “Microsystems Technology” or “micro machined devices”.

The MEMS development stems from the microelectronics industry, and combines and extends the conventional techniques developed for integrated circuit (IC) processing with MEMS-specific processes, to produce micro-miniature mechanical structures with dimensional features on the order of microns.MEMS pressure sensors are used for eye surgery to measure and control the vacuum level used to remove fluid from the eye, which is cleaned of debris and replaced back into the eye during surgery.